Semiconductors
Clean rooms ensure the purity of air control of all physical parameters
Manufacturing facilities for chip and wafer production require the very highest air purity as well as controls on all physical parameters within very tight tolerances.
Integrating all the process equipment while taking different manufacturing technologies into account puts the highest demands on the flexibility and integration capability of the room components.
Beyond the proven clean room products, Viessmann Technologies offers a complete range of active airlocks for personnel and material movement.
